Microelectronics

During the microelectronics boom years in the 1990s, ERG installed a variety of plants treating acid off-gases (HF, F2, HCl, Cl2, etc) with the capability to handle the sticky silanes formed from chlorosilane hydrolysis. We continue to offer high efficiency packed tower scrubbers and non-clogging and highly efficient V-tex® scrubber packages, each optimised for clients in the micro-electronics and optical fibres sectors. And as you’d expect, each integrated system comes with an extraction ductwork system (segregated as required), a simple to operate control panel, and is backed with a process guarantee. Demonstrating IPPC compliance is straightforward as our robust and thoroughly well-engineered systems offer peace of mind to plant operators and the community beyond the site boundary. Quality and certification All ERG systems Vessels can be supplied in accordance with PD5500, BS4994 or ASME VIII.